Flowmeter Uses MEMS Sensor

Engineered with a microelectromechanical systems (MEMS)-based thermal sensor, the 4800 Series is said to deliver exceptionally fast response to changes in gas flow rate. The MEMS sensor achieves extremely fast response rates compared to typical thermal technologies by allowing the gas to flow directly across the sensor, says the vendor. The compact sensor also enables a dramatic reduction in size compared to traditional thermal mass flow devices. The Brooks 4800 Series is well-suited for measurement and control of common gases including air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, CH3H6, and C3H8. A proprietary PID algorithm is used to optimize control valve response, ensuring rapid settling times and quick match of actual mass flow to any changes in setpoint.

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