Highest precision for measuring liquid flow in the range of 0-120ml/min

Oct. 2, 2013
The newest liquid flow sensor from Swiss sensor manufacturer Sensirion excels thanks to its ultra-pure materials and outstanding precision.

The newest liquid flow sensor from Swiss sensor manufacturer Sensirion excels thanks to its ultra-pure materials and outstanding precision. The small SLQ-QT500 sensor is designed for the needs of the semiconductor industry: "The SLQ-QT500 is perfect for the high purity requirements of the semiconductor industry. It can be used to monitor coating processes with a variety of liquids and enables optimal process safety," says Dr. Andres Laib, Director of Sales Liquid Flow Products.
 
The SLQ-QT500 covers flow rates from 0 - 120ml/min. As with all Sensirion liquid flow sensors, its flow channel is absolutely straight and has no moving parts. The sensor is based on the patented CMOSens® Technology. The microthermal flow measurement is performed through the flow channel wall, which separates the chip from the measured liquids. Therefore, only the PFA tubing and the quartz flow channel are in direct contact with the liquid. This guarantees that the sensor has a superb chemical resistance. Thanks to these features as well as the RS485 digital interface, the sensor is able to achieve an exceptionally reliable measurement with a sample rate of up to 1 ms.
 
With this unique technology even liquids with a very high viscosity (100,000 cP and more) are not a problem. Andres Laib says: "The sensor is suitable for measuring hydrocarbon-based solvents such as photoresists, as well as water-based liquids such as TARC and H2O2. With the SLQ-QT500, liquids with virtually any viscosity as well as liquids which contain particles can be measured. This makes the sensor unique in the liquid flow sensor industry.”
 
>>For more information on this product, click here 
 
 

Sponsored Recommendations

Shorten project timelines with these hidden-gem Ignition efficiency tips for designing HMIs, provided by Inductive Automation Sales Engineer Reese Tyson.
Get ready for that “where has this been all my life?” moment—over 25 hidden Ignition features await in our webinar. Our experts show how to boost your productivity and streamline...
Advanced software solutions, like those built in the Ignition platform from Inductive Automation, can provide a crucial means to navigating electrical grid challenges.
Unlock seamless data flow across your manufacturing sites with MQTT and Ignition—turn siloed operations into a connected, data-driven enterprise. Discover how standardization,...