Flexure-guided piezo positioning stages are advantageous when compared to classical mechanical bearing-driven motorized systems due to vibrationless motion, virtually unlimited resolution, and fast response. With the exclusion of rolling elements, there is no bearing rumble to affect the uniformity or straightness of motion. These precision closed-loop XY-stages are equipped with absolute-measuring direct-metrology capacitance sensors and provide resolution down to 0.1 nm in a compact, FEA optimized package for high stiffness and long lifetime. Cost effective, positioning accuracy of 0.02%, and optional vacuum compatibility make these compact stages suitable for applications that require frictionless, vibration-free, positioning with high linearity. Driven by the company’s proprietary PICMA piezo ceramics, the stages have properties especially important in long-term research and industrial applications, including temperature tolerance range of -20 to 80 ºC (-4 to 186 ºF). Features include 50 to 1800 µm travel ranges; <1 nm resolution; a backlash-free precision flexure guiding system; PICMA ultra-long life piezo drives; direct metrology with capacitive sensors for high precision; available X, XY, Z and XYZ versions; and a vacuum option.
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PI (Physik Instrumente) L.P.