The piezo stages offer optional closed-loop feedback using a capacitive sensor design for sub-nanometer resolution and high linearity. Specifications include resolution to 0.15 nm, linearity to 0.007%, and repeatability to 2 nm. A variety of travels (100 µm to 600 µm), feedback options, and vacuum versions are available. Resonant frequencies are up to 885 Hz. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability. Open-loop provides a cost-effective option for applications where compact size, high dynamics, and sub-nanometer positioning resolution are required, but absolute positioning accuracy and repeatability are not required. Open-loop designs can also be used where the piezo position is controlled via an external feedback source (interferometer, vision system, photodetector, etc.). When coupled with the company's Q-series controllers and drives, the stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Dynamic Controls Toolbox and Motion Designer provide tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.
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Aerotech Inc.
www.aerotech.com
412.963.7470
