Stages come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm). The design is suitable for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation. The stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure multi-axis accuracy, high stiffness, and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response. The drive design minimizes X and Y yaw errors while still maintaining an Abbe-compliant metrology system. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors. Units are available with closed or open-loop feedback. The capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.
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