Subscribe and listen to AW’s podcast!
Subscribe and listen to the Automation World Gets Your Questions Answered podcast!
Listen Here

XYZ Piezo Stages

Aerotech’s QNP3 series XYZ piezo positioning stages combine sub-nanometer resolution, high dynamics, and a high level of geometric performance in a compact three-degree-of-freedom (DoF) package.

Aw 120326 1705np Aerotech

Stages come with a 40 mm x 40 mm clear aperture with closed-loop travels up to 100 µm x 100 µm x 10 µm (open-loop travels to 120 µm x 120 µm x 12 µm). The design is suitable for optical and scanning probe microscopy or other inspection or manufacturing applications where two-sided part access is required with three-DoF manipulation. The stages use an FEA-optimized precision parallel-kinematic flexure and metrology design to ensure multi-axis accuracy, high stiffness, and long device life. High stiffness and resonant frequency enable high process throughput and fast closed-loop response. The drive design minimizes X and Y yaw errors while still maintaining an Abbe-compliant metrology system. Z-axis actuators and capacitive sensors are designed to provide Abbe-compliant feedback in the vertical direction with minimal geometric errors. Units are available with closed or open-loop feedback. The capacitive sensor parallel-metrology design directly measures the output of the positioning carriage, delivering sub-nanometer resolution, linearity errors better than 0.01%, and single-digit nanometer repeatability.

>>For more information on this product, click here
Aerotech Inc.

Fill out the form below to request more information about XYZ Piezo Stages
Revealed: Sensor & AI Secrets
New report features peers and pros on how machine vision, smart instrument sensors and AI can improve manufacturing.
Download e-book
Revealed: Sensor & AI Secrets
Test Your Machine Learning Smarts
Take Automation World's machine learning quiz to prove your knowledge!
Take Quiz
Test Your Machine Learning Smarts