This combination allows for very high stiffness with low cost of ownership and can easily replace rotary air bearing systems used for metrology. The system can be ordered in incremental or absolute models, where the incremental versions have encoders with 30,000 signal periods per revolution and system accuracies down to ±2.5 arc seconds. The absolute version has the same accuracy level and resolutions to 28 bits via the EnDat 2.2 interface. The slotless iron-core ETEL torque motor has a peak torque of 2.7 Nm, a rated torque of 0.387 Nm and the detent torque is 0.2% of the rated value. The motor is rated for 300 RPM and permits an extraordinarily smooth motion. The unit is only 46.3 mm in height and 124 mm in diameter. Suggested applications are in semiconductor manufacturing, metrology, and micromachining. The system is intended for use with the AccurET position controllers from ETEL as absolute peak performance can be achieved with regard to dynamics, thermal management, and position stability. Other controllers can be used, but thermal overload protection must be maintained in the controller.
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