High Precision, Low Profile XY Open Aperture Stage Has 1 Micron Resolution and 2 Micron Repeatability
The linear travel of the X and Y axes is 100 x 100 mm, and the resolution of each axis is 20 µm (non-micro-step) or 1 µm (20 micro-steps per step motor driver in use). Repeatability is 2 µm, and the positional accuracy is 3 µm. The stages have preloaded V-groove and crossed roller bearings and ground 4 mm per-turn lead screws with just 2 µm of backlash. Designed for applications such as laser drilling, machining, medical, industrial, semiconductor handling, testing, scanning, alignment, assembly and optical applications, this compact, low-profile black anodized aluminum XY stage is easy to integrate into new or existing systems. The stage's table measures 300 x 300 mm and the open aperture measures 188 x 188 mm. A recessed mounting and precision pattern of drilled and threaded mounting holes facilitate the alignment of tooling or fixtures. Solid tooling plates are available for custom and interchangeable applications. The standard two-phase (1.8-degree) stepper motors have knobs for manual adjustments of each axis of the stage; however, the knobs can be replaced with incremental encoders for position verification.
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OES
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