The stages feature X and Y axis linear resolutions of 0.25µ (micro-steps per step motor driver in use). The repeatability of each is 1.5µ, positional accuracy is 5µ, and backlash is 2µ. Total travel is ±7.5 mm in the X and Y axes and ± 180º of rotation (theta). The 1 mm-per-turn ground lead screws and preloaded V-groove and crossed roller bearings add to the high precision and stiffness of the alignment stages. The 60 mm diameter theta stage is driven by a 90:1 precision worm gear. The resolutions of each of the theta stages is 0.001º (micro-steps per step motor driver in use). Repeatability is 0.005º, positional Accuracy is 0.001º and backlash is 0.005º. Two-phase stepper motors are standard and a knob for manual adjustments of each axis can be replaced with an incremental encoder for position verification, or with a servo motor and encoder for closed loop operation.
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