The new SFS Flow Module from Innovative Sensor Technology offers continuous gas flow monitoring with a response time of ≤20ms. It comes factory-linearized with a repeatability of 0.2 %, accuracy of up to 2% f.s. and is available in three versions for different flow rates (+/-50 sccm, +/-200 sccm and +/-1000 sccm.) The flow module has both an analog and a digital I2C output and is equipped with two address pins. With an installation space of 50x40x20mm, it is small enough for integration into a measuring unit.