The GF Series ultra-high purity mass flow controllers have been enhanced to deliver a new level of performance and flexibility.
Flow rates available on the GF Series have been increased from the
previous 3 sccm-to-30 slpm to a new full-scale flow rate of 55 slpm. The
modular, user-programmable, metal-sealed GF Series mass flow controller
features MultiFlo technology, which enables simple re-programming of
the gas and full scale range in less than 30 seconds without removing
the mass flow controller from the gas line, says the vendor. Compared to
traditional single point gas conversion factors, MultiFlo mass flow
controllers are said to deliver up to a three-times improvement in
accuracy through the application of advanced gas modeling and
compensation for non-ideal/non-linear gases.Brooks Instrument LLC www.BrooksInstrument.com215.362.3527
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