Vision-based Wafer Pre-aligner

The In-Sight 1820 vision-based wafer pre-aligner provides precise non-contact measurement of wafer position and orientation.

Aw 4025 0801 Np13

The pre-aligner determines wafer position and orientation in less than half a second while mechanical pre-aligners must typically spin wafers for several seconds. NotchMax, the newest member of the vendor's family of geometric pattern finding technologies, aligns wafers with a center position accuracy of +/-15m and an orientation accuracy of +/-0.05 degrees. 

Cognex Corp.


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