Siemens White Paper 5da5ad6d9a6e4

Brooks Instrument

407 West Vine Street
Hatfield,, PA 19440-0903
USA
1-888-554-3569
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More Info on Brooks Instrument

Siemens White Paper 5da5ad6d9a6e4

Mass flow meters and mass flow controllers by Brooks are a proven solution for flow measurement and control challenges. With over 60 years of experience, Brooks provides Coriolis mass flow controllers & meters, thermal mass flow controllers & meters, variable area flow meters, capacitance manometers, pressure control (pressure controllers, pressure gauges, pressure transmitters, pressure sensors and more), and level measurement technologies to improve your processes.

Products

010224
The third-generation Quantim QMC Coriolis mass flow controllers (MFCs) feature a stainless steel sensor that measures low flows independent of fluid type or process variables....
Feb. 2, 2024
11
The SLAMf series of elastomer-sealed, IP66-rated thermal mass flow controllers (MFCs) now offer Class I/Division 2 and Zone 2 approvals for hazardous and harsh environments. These...
Nov. 14, 2023
Brooks Instrument has added the Ethernet/IP digital communications interface to its SLA5800 Series mass flow controller family.
Brooks Instrument has added the Ethernet/IP digital communications interface to its SLA5800 Series mass flow controller family.
March 20, 2019
Aw 104315 1608np Brooks
New versions from Brooks Instrument are equipped with the high-speed EtherCAT interface for both high- and low-flow process gas applications.
Aug. 7, 2016
Aw 19507 1311np Brooks
Three additions to the GF100 Series offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
Nov. 14, 2013
Aw 14098 8283498249 0c3f4f28f2
Supplier Submitted
Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has received International Electrotechnical Commission (IECEx) certification...
Dec. 21, 2012

News

Original
Supplier Submitted
The new GP200 Series improves flow measurement accuracy and repeatability in semiconductor manufacturing over the widest range of operating conditions in the industry.
Oct. 14, 2021

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