Brooks Instrument

Hatfield,, PA 19440-0903


About Brooks Instrument


407 West Vine Street
Hatfield,, PA 19440-0903

More Info on Brooks Instrument

Siemens White Paper

Mass flow meters and mass flow controllers by Brooks are a proven solution for flow measurement and control challenges. With over 60 years of experience, Brooks provides Coriolis mass flow controllers & meters, thermal mass flow controllers & meters, variable area flow meters, capacitance manometers, pressure control (pressure controllers, pressure gauges, pressure transmitters, pressure sensors and more), and level measurement technologies to improve your processes.

Products & Press Releases


Hazardous Area Mass Flow Controllers

Nov. 14, 2023
The SLAMf series of elastomer-sealed, IP66-rated thermal mass flow controllers (MFCs) now offer Class I/Division 2 and Zone 2 approvals for hazardous and harsh environments. These...
Mass Flow Controller from Brooks has High-Speed Ethernet/IP Interface

Mass Flow Controller has High-Speed Ethernet/IP Interface

March 20, 2019
Brooks Instrument has added the Ethernet/IP digital communications interface to its SLA5800 Series mass flow controller family.
Aw 104315 1608np Brooks

High-Speed EtherCAT Mass Flow Controllers

Aug. 7, 2016
New versions from Brooks Instrument are equipped with the high-speed EtherCAT interface for both high- and low-flow process gas applications.
Aw 19507 1311np Brooks

Brooks: Mass Flow Controllers

Nov. 14, 2013
Three additions to the GF100 Series offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
Aw 14098 8283498249 0c3f4f28f2

Brooks Instrument: Pressure Transducers Receive International Explosion-Proof Rating

Dec. 21, 2012
Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has received International Electrotechnical Commission (IECEx) certification...

Articles & News


Brooks Instrument Introduces First Fully Pressure-Insensitive Pressure-Based Mass Flow Controller for Etch and CVD Processes in Semiconductor Manufacturing

Oct. 14, 2021
The new GP200 Series improves flow measurement accuracy and repeatability in semiconductor manufacturing over the widest range of operating conditions in the industry.

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