More from Brooks Instrument
Brooks Instrument Introduces First Fully Pressure-Insensitive Pressure-Based Mass Flow Controller for Etch and CVD Processes in Semiconductor Manufacturing
The new GP200 Series improves flow measurement accuracy and repeatability in semiconductor manufacturing over the widest range of operating conditions in the industry.
Oct 14th, 2021
Mass Flow Controller has High-Speed Ethernet/IP Interface
Brooks Instrument has added the Ethernet/IP digital communications interface to its SLA5800 Series mass flow controller family.
Mar 20th, 2019
High-Speed EtherCAT Mass Flow Controllers
New versions from Brooks Instrument are equipped with the high-speed EtherCAT interface for both high- and low-flow process gas applications.
Aug 7th, 2016
Brooks: Mass Flow Controllers
Three additions to the GF100 Series offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
Nov 13th, 2013
Brooks Instrument: Pressure Transducers Receive International Explosion-Proof Rating
Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has received International Electrotechnical Commission (IECEx) certification for its SolidSense II pressure transducers.
Dec 21st, 2012