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    • Brooks Instrument

    Hatfield,, PA 19440-0903

    COMPANY OVERVIEW

    About Brooks Instrument

    Contact

    407 West Vine Street
    Hatfield,, PA 19440-0903
    USA
    http://www.brooksinstrument.com/
    1-888-554-3569

    More Info on Brooks Instrument

    Siemens White Paper

    Mass flow meters and mass flow controllers by Brooks are a proven solution for flow measurement and control challenges. With over 60 years of experience, Brooks provides Coriolis mass flow controllers & meters, thermal mass flow controllers & meters, variable area flow meters, capacitance manometers, pressure control (pressure controllers, pressure gauges, pressure transmitters, pressure sensors and more), and level measurement technologies to improve your processes.

    Products & Press Releases

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    Hazardous Area Mass Flow Controllers

    Nov. 14, 2023
    The SLAMf series of elastomer-sealed, IP66-rated thermal mass flow controllers (MFCs) now offer Class I/Division 2 and Zone 2 approvals for hazardous and harsh environments. These...
    Mass Flow Controller from Brooks has High-Speed Ethernet/IP Interface
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    Mass Flow Controller has High-Speed Ethernet/IP Interface

    March 20, 2019
    Brooks Instrument has added the Ethernet/IP digital communications interface to its SLA5800 Series mass flow controller family.
    Aw 104315 1608np Brooks
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    High-Speed EtherCAT Mass Flow Controllers

    Aug. 7, 2016
    New versions from Brooks Instrument are equipped with the high-speed EtherCAT interface for both high- and low-flow process gas applications.
    Aw 19507 1311np Brooks
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    Brooks: Mass Flow Controllers

    Nov. 14, 2013
    Three additions to the GF100 Series offer higher flow, improved accuracy and a faster response time for gas flow control in semiconductor and LED manufacturing processes.
    Aw 14098 8283498249 0c3f4f28f2
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    Brooks Instrument: Pressure Transducers Receive International Explosion-Proof Rating

    Dec. 21, 2012
    Brooks Instrument, a world-leading provider of advanced flow, pressure, vacuum and level solutions, has received International Electrotechnical Commission (IECEx) certification...

    Articles & News

    Original
    Control

    Brooks Instrument Introduces First Fully Pressure-Insensitive Pressure-Based Mass Flow Controller for Etch and CVD Processes in Semiconductor Manufacturing

    Oct. 14, 2021
    The new GP200 Series improves flow measurement accuracy and repeatability in semiconductor manufacturing over the widest range of operating conditions in the industry.

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