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Deal Strengthens Brooks Share in Thermal Mass Flow Market

The acquisition of Celerity’s Instrumentation division boosts Brooks Instrument’s position in the semiconductor, solar, and electronics industries.

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Brooks Instrument (, a Hatfield, Pa.-based provider of flow measurement and control devices and level gauges, announced on June 15 that it has acquired certain assets of the Instrumentation division of Celerity Inc. (, San Jose, Calif. Financial terms of the transaction were not disclosed.

Celerity designs and manufactures precision instruments and advanced gas and liquid delivery solutions, including thermal mass flow devices, for the semiconductor industry where it has established a global share leadership position, according to Brooks. The combined product technology, applications expertise, and operating capabilities of Brooks Instrument and Celerity will well position customers of both companies with market leading offerings in each of its principal product markets, Brooks said.

“This is an extremely exciting time for Brooks,” stated Jim Dale, chief executive officer of Brooks Instrument. “With this acquisition, we strengthen our share in the thermal mass flow instrumentation market and establish an entry point with attractive product technology in vacuum and pressure measurement markets. Celerity’s strong semiconductor market position together with Brooks’ strong industrial market position will create the number one thermal mass flow supplier in the world.”

The acquisition includes Celerity’s next generation GF Series thermal mass flow controller, designed to precisely measure, monitor, and control ultrahigh-purity process gas chemistry in semiconductor device and solar cell manufacturing processes; as well as other specialty products serving vacuum and pressure measurement markets.

Assets acquired by Brooks Instrument include Celerity’s Allen, Texas, operations and its Irvine, Calif., technology center as well as other sales and service locations throughout the world.

Brooks Instrument

Celerity Inc.

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