Suggested applications include optics positioning, z-axis positioning of sensors in surface metrology, and general purpose high-precision alignment. The precision ground, preloaded ball-screw coupled with a low thermal expansion linear encoder provides accuracy, repeatability and a positioning resolution capability to 25 nm. Anti-creep, crossed-roller bearings provide smooth travel and high load capacity in a compact package. The low thermal expansion (3.3 ppm/°C) precision glass scale encoder results in high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs for easy integration with all standard controllers. Motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. The unit is available with and without optional bellows way covers, and an optional mounting plate provides direct mounting to both English and metric optical breadboards, while the inherent mounting compatibility between all MPS stages results in simple development of multi-axis arrangements.
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