The linear travel of the X and Y axes is 50 mm x 50 mm, and the resolution of each axis is 5 microns (non-micro-step) or 0.125 microns (with 20 micro-steps per step motor driver in use). Repeatability is 1.5 microns and positional accuracy is 5 microns. The 1 mm per-turn lead screws and preloaded V-groove and crossed roller bearings contribute to the high precision and stiffness. The table measures 155 mm x 155 mm and features a precision pattern of drilled and threaded mounting holes to facilitate the addition of tooling or fixtures. A table with a large open aperture is also available. The low profile black anodized aluminum XY stage is easy to integrate into new or existing systems. Suggested applications include alignment, assembly, laser drilling, machining, medical, industrial, semiconductor handling, testing, scanning, and optical.
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